Journal of the Korean Society for Precision Engineering (한국정밀공학회지)

Korean Society for Precision Engineering (한국정밀공학회)
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A Study on the Optimal Structural Design using FEM for Micro Stage

마이크로 스테이지의 유한요소해석

  • Kim, Jae-Yeol (Dept.of Mechanical Engineering, Chosun University) ;
  • Gwak, Lee-Gu (Dept.of Precision Mechanical Engineering, Graduate School of Chosun University) ;
  • Han, Jae-Ho (Dept.of Automotive, Songwon College) ;
  • Kim, Hang-U (Dept.of Automotive, Songwon College) ;
  • Published : 2002.10.01
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Abstract

For optimal design of micro stage, we measured the displacement of piezoelectric transducer that was based on voltage value. And the micro stage was analyzed using FEM with displacement data including voltage value of piezoelectric transducer. For verification of analysis results, the displacements were measured by using Laser-interferometer. And researchers confirmed to propriety on design of micro stage with FEM, we obtained 3.5% error rate between measurement results and analyzing results.

Keywords

References

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