Journal of the Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회논문지)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
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Deposition of Carbon Thin Film using Laser Ablation and Its Field Emission Properties

레이저 증착법에 의한 탄소계 박막의 구조 및 전계방출특성

  • 류정탁 (대구대학교 정보통신공학부) ;
  • ;
  • 김연보 (대구대학교 정보통신공학부)
  • Published : 2002.07.01
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Abstract

Using laser ablation technique carbon thin films were deposited on Si(100) substrate as a function of substrate temperature. In this study, the surface morphologic, structural and field emission properties of these carbon thin films were investigated using Raman spectroscopy, scanning electron microscopy, and a diode technique, respectively. With increasing of the substrate temperature, the surface morphologies were changed significantly. Moreover, the intensity of D-band and the full width at half maximum of these bands were dependent on substrate temperatures. As the substrate temperature was increased, the field emission properties were improved. As the result, we find that the field emission properties of the films were changed significantly with the substrate temperature and structural features of carbon than films.

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References

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