Journal of Information Display
- Volume 2 Issue 2
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- Pages.52-60
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- 2001
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- 1598-0316(pISSN)
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- 2158-1606(eISSN)
Electrical and Mechanical Properties of Indium-tin-oxide Films Deposited on Polymer Substrate Using Organic Buffer Layer
- Han, Jeong-In (Korea Electronics Technology Institute) ;
- Lee, Chan-Jae (Korea Electronics Technology Institute) ;
- Rark, Sung-Kyu (Korea Electronics Technology Institute) ;
- Kim, Won-Keun (Korea Electronics Technology Institute) ;
- Kwak, Min-GI (Korea Electronics Technology Institute)
- Published : 2001.06.24
Abstract
The electrical and mechanical properties in indium-tin-oxide films deposited on polymer substrate were examined. The materials of substrates were polyethersulfone (PES) which have gas barrier layer and anti-glare coating for plastic-based devices. The experiments were performed by rf-magnetron sputtering using a special instrument and buffer layers. Therefore, we obtained a very flat polymer substrate deposited ITO film and investigated the effects of buffer layers, and the instrument. Moreover, the influences of an oxygen partial pressure and post-deposition annealing in ITO films deposited on polymer substrates were clarified. X-ray diffraction observation, measurement of electrical property, and optical microscope observation were performed for the investigation of micro-structure and electro-mechanical properties, and they indicated that as-deposited ITO thin films are amorphous and become quasi-crystalline after adjusting oxygen partial pressure and thermal annealing above