한국표면공학회지 (Journal of the Korean institute of surface engineering)
- 제34권2호
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- Pages.97-104
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- 2001
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- 1225-8024(pISSN)
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- 2288-8403(eISSN)
플라즈마 화학증착법에 의해 제조된 (Ti$_{1-x}$ AI$_{x}$ )N 박막의 미세조직 및 기계적 특성에 관한 연구
The Microstructure And The Mechanical Properties Of(Ti$_{1-x}$ AI$_{x}$ )N Coatings Deposited By Plasma Enhanced Chemical Vapor Deposition(PECVD)
- 이동각 (서울대학교) ;
- 이승훈 (서울대학교) ;
- 한영훈 (서울대학교) ;
- 이정중 (서울대학교)
- Lee, D.K. (School of Materials and Engineering, Seoul National University) ;
- Lee, S.H. (School of Materials and Engineering, Seoul National University) ;
- Han, Y.H. (School of Materials and Engineering, Seoul National University) ;
- Lee, J.J. (School of Materials and Engineering, Seoul National University)
- 발행 : 2001.04.01
초록
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