한국표면공학회지 (Journal of the Korean institute of surface engineering)
- 제34권2호
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- Pages.89-96
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- 2001
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- 1225-8024(pISSN)
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- 2288-8403(eISSN)
비대칭 마그네트론 스퍼터링법에 의해 합성된 STR304 스테인리스강 박막에서의 질소와 산소의 첨가 효가
Effect of $N_2$ and $O_2$ Properties of STS304 Stainless Steel Films Synthesized by Unbalanced Magnetron Sputtering Process
초록
N- or O-doped STS304 stainless films were synthesized by an unbalanced magnetron sputtering process with various argon and reactive gas (
키워드