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The Institute of Electronics and Information Engineers (대한전자공학회)
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Lithography 기술과 Trend에 대한 고찰

  • 조한구 (삼성전자 반도체 연구소 공정개발팀)
  • Published : 2001.08.01
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Abstract

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References

  1. Fundamentals of Micro-electronics Processing Hong H. Lee.
  2. Silicon VLSI Technology J.D. Plummer.;M.D. Deal.;P.B. Griffin.
  3. Lithography 공정 기술 삼성전자 반도체 Memory 사업부
  4. Inside Prolith, a Comprehensive Guide to Optical Lithography Simulation C.A. Mark.
  5. Microlithography Science and Technology J.R. Sheats.;B.W. Smith.
  6. ASML's 3rd DUV Technical Symposium 130nm device patterining using KrF lithography I.S. Kim.;J.H. Lee.;J.L. Nam.;H.K. Cho.;J.T. Moon.
  7. 4th NGL Workshop Building Consensus International SEMATECH
  8. Technology Roadmap for Nanoelectronics European Commission.