Transactions on Electrical and Electronic Materials

  • 제2권1호
  • /
  • Pages.12-15
  • /
  • 2001
  • /
  • 1229-7607(pISSN)
  • /
  • 2092-7592(eISSN)
한국전기전자재료학회 (The Korean Institute of Electrical and Electronic Material Engineers)
권호 표지

Phase Stability of Bi-2212 and Bi-2223 Thin Films Prepared by IBS Technique

  • Yang, Sung-Ho (Department of Electrical and Electronic Engineering, Dongshin University) ;
  • Park, Yong-Pil (Department of Automotive Maintenance, Kyungwon college)
  • 발행 : 2001.03.01
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초록

Bi-2212 and Bi-2223 thin films are prepared by IBS(ion beam sputtering) technique. Three phases of Bi-2201, Bi-2212 and Bi-2223 appear as stable ones in spite of the conditions for thin film fabrication of Bi-2212 and Bi-2223 compositions, depending on substrate temperature (T $_{sub}$) and ozone pressure(PO$_3$). It is found out that these phases are limited within very narrow temperature.e.

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