Journal of Advanced Marine Engineering and Technology
- 제25권3호
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- Pages.631-635
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- 2001
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- 2234-7925(pISSN)
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- 2234-8352(eISSN)
미소가속도계 센서의 제조공정에서 잔류응력 해석
Analysis of Residual Stresses at Manufacturing Precesses for Microaccelerometer Sensors
초록
The major problems associated with the manufacturing processes of the microaccelerometer based on the tunneling current concept is the residual stress. This paper deals with finite element analysis of residual stress causing pop up phenomenon which are induced in micromachining processes for a microaccelerometers sensor using silicon on insulator(SOI) wafer. After heating the tunnel gap up to
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