Measurement of Micro-Tensile Properties using ESPI technique

ESPI 기법을 이용한 미소 인장 특성 추정

  • Published : 2001.05.01

Abstract

An electronic speckle pattern interferometry (ESPI) system for measuring tensile properties under micro-tensile testing has been developed. The system consists of an optical system and an image processing system. In the optical system, optical components for measurement of in-plane deformation are arranged on the path of He-Ne laser. In the image processing system, the window-based program for acquiring speckle pattern interferometric image was developed and deformation in a small specimen is continuously evaluated during the test. Using this system, tensile strain of copper foil was measured during tensile testing. Tensile specimen had the thickness and width of 22 and 500 ${\mu}{\textrm}{m}$, respectively. Tensile properties, including the elastic modulus, yielding strength and tensile strength, of the copper were evaluated and also plastic exponent and coefficient in the Ramberg-Osgood relationship were evaluated from the stress-strain curve.

Keywords

References

  1. Randy Crane, A simplified approach to Image Processing, Prentice Hall PTR, pp. 67-76, 1997
  2. Pramod K. R.(Ed.), Holographic Interferometry principles and Methods, Springer-Verlag, pp. 122-125, 1994
  3. Gary L. C., Optical Methods of Engineering Analysis, 1st ed., Cambridge Univ. press, pp. 395-491, 1995
  4. Read D.T., 'Young's Modulus of Thin Films by Speckle Interferometry,' Measurement Science and Technology, 9, pp. 676-685, 1998 https://doi.org/10.1088/0957-0233/9/4/016
  5. Vlassak J.J. and Nix W.D., 'A New Bulge test technique for the determination of Young's Modulus and Poisson's ratio of Thin Film,' J. Materials Res., Vol. 7, No. 12, pp. 3242-3249, 1992 https://doi.org/10.1557/JMR.1992.3242
  6. Stone D.S. et al., 'Indentation Technique to investigate elastic moduli of thin Film on substrate,' in thin film: Stress and mechanical properties, Vol. 130, Pittsburgh, PA:Materials Research Soc., pp. 105-110, 1989
  7. Koskinen J., J.E. Steinwall J.E., R. Soave, and Johnson H.H., 'Microtensile testing of free-standing polysilicon fibers of various grain sizes,' J. Micromech. Microeng., Vol. 3, No. 1, pp. 13-17, 1993 https://doi.org/10.1088/0960-1317/3/1/004
  8. Weihs T.P., Hong S., Bravmann J.C., Nix W.D., 'Measuring the strength and stiffness of thin film materials by mechanically deflecting cantilever microbeams,' Thin films: Stress and mechanical properties, Vol. 130, Pittsburgh, PA:Materials Research Soc., pp. 87-92, 1989
  9. Ding X., Ko W.H., Mansour J.M., 'Residual Stree and mechanical properties of boron-doped p+-silicon films,' Sens. Actuators, Vol. A23, No. 1-3, pp. 866-871, 1990
  10. Sharper W.N., Jr., Yuan B., and Edwards R.L., 'A New Technique for Measuring the mechanical properties of thin films,' J. microelectromechnical Systems, Vol. 6, No. 3, 1997 https://doi.org/10.1109/84.623107