Journal of the Institute of Electronics Engineers of Korea SD (대한전자공학회논문지SD)

The Institute of Electronics and Information Engineers (대한전자공학회)
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A Study on the Extraction of Cell Capacitance and Parasitic Capacitance for DRAM Cell Structures

DRAM 셀 구조의 셀 캐패시턴스 및 기생 캐패시턴스 추출 연구

  • Yoon, Suk-In (School of Electrical and Computer Engineering, Inha University) ;
  • Kwon, Oh-Seob (School of Electrical and Computer Engineering, Inha University) ;
  • Won, Tae-Young (School of Electrical and Computer Engineering, Inha University)
  • 윤석인 (仁荷大學校 電氣電子컴퓨터工學部) ;
  • 권오섭 (仁荷大學校 電氣電子컴퓨터工學部) ;
  • 원태영 (仁荷大學校 電氣電子컴퓨터工學部)
  • Published : 2000.07.01
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Abstract

This paper reports a methodology and its application for extracting cell capacitances and parasitic capacitances in a stacked DRAM cell structure by a numerical technique. To calculate the cell and parasitic capacitances, we employed finite element method (FEM), The three-dimensional DRAM cell structure is generated by solid modeling based on two-dimensional mask layout and transfer data. To obtain transfer data for generating three-dimensional simulation structure, topography simulation is performed. In this calculation, an exemplary structure comprising 4 cell capacitors with a dimension of $2.25{\times}1.75{\times}3.45{\mu}m^3$, 70,078 nodes with 395,064 tetrahedra were used in ULTRA SPARC 10 workstation. The total CPU time for the simulation was about 25 minutes, while the memory size of 201MB was required. The calculated cell capacitance is 24.34fF per cell, and the influential parasitic capacitances in a stacked DRAM cell are investigated.

본 논문에서는 DRAM 셀 내의 셀 캐패시턴스 및 기생 캐패시턴스를 수치 해석적으로 계한하여 추출하는 방법과 그 적용 예를 보고한다. 셀 캐패시턴스 및 기생 캐패시턴스를 계산하기 위하여 유한요소법을 적용하였다. 시뮬레이션의 구조를 정의하기 우하여, 마스크 레이아웃 데이터 및 공정 레시피를 이용한 토포그래피 시뮬레이션을 수행하고, 토포그래피 시뮬레이션을 통해 DRAM 셀 구조를 생성하기 위해 필요한 데이터를 얻었다. 이를 기반으로 하여, 마스크 데이터 기반의 3차원 솔리드 모델링 방법을 적용하여 시뮬레이션 구조를 생성하였다. 시뮬레이션에 사용된 구조는 $2.25{\times}175{\times}3.45{\mu}m^3$ 크기이며, 4개의 셀 캐패시터를 갖는다. 또한 70,078개의 노드와 395,064개의 사면체로 구성되었다. 시뮬레이션을 위해 ULTRA SPARC 10 웨크스테이션에서 약 25분의 CPU 시간을 소요하였으며, 약 201메가바이트의 메모리를 사용하였다. 시뮬레이션을 통하여 계산된 셀 캐패시턴스는 셀당 24fF이며, DRAM 셀 내에서 가장 주요한 기생 캐패시턴스 성분을 규명하였다.

Keywords

References

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