Journal of Korean Vacuum Science & Technology
- Volume 4 Issue 2
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- Pages.50-54
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- 2000
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- 1226-6167(pISSN)
Activation energy for the loss of substitutional carbon in $Si_{0.984}C_{0.016}$ grown by solid phase epitaxy
- Kim, Yong-Jeong (School of Materials Science and Engineering, Seoul National University) ;
- Kim, Tae-Joon (School of Materials Science and Engineering, Seoul National University) ;
- Park, Byungwoo (School of Materials Science and Engineering, Seoul National University) ;
- Song, Jong-Han (Korea Institute of Science and Technology)
- Published : 2000.06.01
Abstract
We studied the synthesis of S