한국표면공학회지 (Journal of the Korean institute of surface engineering)
- 제33권5호
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- Pages.319-328
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- 2000
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- 1225-8024(pISSN)
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- 2288-8403(eISSN)
Tribology특성 향상을 위한 Ag 박막의 형성과 평가에 관한 연구
A Study on Formation and Evaluation of he Thin Films for Improvement of Tribology Properties
초록
Silver is known to have such characteristics as low shear strength, good transfer-film forming tendency, and good corrosion resistance. Silver thin films have been prepared by ion plating of physical vapour deposition (PVD) using both argon gas pressure and bias voltage of processing condition. After the silver films were prepared, the properties in them were examined by gas pressure and bias voltage of substrate. Their morphology and crystal orientation were investigated by scanning electron microscopy (SEM) and X-ray diffractor. The properties of film were, also, studied to relate with morphology, X-ray diffraction pattern, and friction coefficient at vacuum ambient. The friction coefficient was stabilized remarkably on deposited films with increasing argon pressure for deposition. Also, the effect of increasing of the bias voltage for deposition resulted in lower friction coefficient and stability in
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