한국결정학회지 (Korean Journal of Crystallography)
- 제11권4호
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- Pages.207-211
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- 2000
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- 1229-8700(pISSN)
초크랄스키 실리콘 단결정에서 성장 쌍정과 결정 외형의 관계
Relation Between the Growth Twin and the Morphology of a Czochralski Silicon Single Crystal
초록
In a Czochralski silicon single crystal, the relation between the growth twin and the crystal morphology was investigated. The growth twin is nucleated on the {111} facet planes near the growth ridges. When a {111} growth twin is formed in the <100> silicon crystal, the growth ridge where twin is nucleated will continuous through the twin plane. Other two ridges at the 90。 apart will be displaced about 33° and be deformed to facets. The ridge on the opposite side of twin nucleation will disappear by forming a slight hill. Because the growth ridges of silicon is due to the {111} planes, the variation in the growth ridge formation can be predicted clearly by considering the change of the {111} plane traces in the stereographic projection after twining.
키워드