Fabrication and Characteristics of Humidity Sensing Device using $TiO_2$ Sol

$TiO_2$ Sol을 이용한 습도감지소자의 제작 및 특성

  • Published : 2000.02.01

Abstract

Humidity sensors using $TiO_2$ thin films were fabricated on the multi-electrode device by Sol-Gel method and their wettability, surface potential decays and humidity sensing characteristics were investigated. Contact angle of thin films was $28^{\cic}\;at\; 400^{\circ}C$ and surface potential decayed rapidly at $400^{\circ}C$. The specimen showed best humidity sensing characteristics at $400^{\circ}C$. From the results, they were confirmed that humidity sensing characteristics of thin films have connection with contact angle and surface potential decays.

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References

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