The Korean Journal of Ceramics
- Volume 5 Issue 2
- /
- Pages.131-136
- /
- 1999
- /
- 1225-9381(pISSN)
Deposition of Yttria Stabilized Zirconia by the Thermal CVD Process
- In Deok Jeon (National Creative Initiation Center for Microstructure Science of Materials) ;
- Latifa Gueroudji (Korae Research Institute of Standards and Science) ;
- Nong M. Hwang (National Creative Initiative Center for Microstructure Science of Materials Seoul National University, Korea Research Institute of Standards and Science)
- Published : 1999.06.01
Abstract
Yttria stabilized zirconia(YSZ) films were deposited on porous NiO substrates and quartz plates by the thermal CVD using