Journal of Institute of Control, Robotics and Systems (제어로봇시스템학회논문지)

Institute of Control, Robotics and Systems (제어로봇시스템학회)
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Robust controller design for RTP system using structured uncertainty approach

구조적 불확실성 접근을 이용한 RTP 시스템의 견실제어기 설계

  • 이상경 (두원공과대학 컴퓨터응용제어과) ;
  • 김종해 (경북대학교 센서기술연구소) ;
  • 김해근 (전자통신연구소 차세대 교환 전송실) ;
  • 박홍배 (경북대학교 전기전자공학부)
  • Published : 1999.08.01
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Abstract

In this paper, we propose a robust controller design of RTP(Rapid Thermal Processing) system using structured uncertainty approach. Using the weighted mixed sensitivity function, we solve the robust stability problem against disturbance and temperature variation, and design a $\mu$ controller using curve fitting method against structured uncertainty. Also the reduction method should be requried because of the difficulty of implementaion with the obtained high order controller. We dal with robust stability and performance of RTP system by the design of $\mu$ controller for original model and Schur balanced reduced model. Finally the simulation results are proposed to show the validity of the proposed method.

Keywords

References

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