Journal of Sensor Science and Technology (센서학회지)
- Volume 8 Issue 5
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- Pages.400-406
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- 1999
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- 1225-5475(pISSN)
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- 2093-7563(eISSN)
Fabrication and Characteristics of Piezoresistive Flow Sensor with Microbeam Structures
미소 빔 구조를 가진 압저항형 유체센서의 제작 및 특성
- Park, Chang-Hyun (School of Electronic & Electrical Eng., Kyungpook Nat'l University) ;
- Kang, Sung-Gyu (School of Electronic & Electrical Eng., Kyungpook Nat'l University) ;
- Yu, In-Sik (Dept. of Computer Science, Kyungdong College of Techno Information) ;
- Sim, Jun-Hwan (Dept. of Electronics & Communication Eng., Korea Maritime University) ;
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Lee, Jong-Hyun
(School of Electronic & Electrical Eng., Kyungpook Nat'l University)
- 박창현 (경북대학교 전자전기공학부) ;
- 강서유 (경북대학교 전자전기공학부) ;
- 류인식 (경동정보대학 전자계산과) ;
- 심준환 (한국해양대학교 전자통신공학과) ;
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이종현
(경북대학교 전자전기공학부)
- Published : 1999.09.30
Abstract
Piezoresistive flow sensors with four different types of microbeam structures were fabricated using (100), n/
(100), n/
Keywords