Journal of Sensor Science and Technology (센서학회지)
- Volume 8 Issue 5
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- Pages.394-399
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- 1999
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- 1225-5475(pISSN)
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- 2093-7563(eISSN)
Fabrication and Characteristics of Hot-film Air Flow Sensor for Automobile
자동차용 박막 히터형 공기유량센서의 제작 및 특성
- Kim, Hyung-Pyo (Dept. of Electronic and Electrical Eng., Sangju Nat'l Univ.) ;
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Park, Se-Kwang
(School of Electronic and Electrical Eng., kyungpook Nat'l Univ.)
- Published : 1999.09.30
Abstract
An automobile hot-film air flow sensor is deposited with platinum by sputtering method, patterned by photoresisted lift-off method, annealed in
자동차용 박막 히터형 공기 유량센서는 스퍼터링법으로 백금박막을 증착하여 감광막 lift-off법으로 패터닝하고
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