초록
A low loss x-cut $LiNbO_3$optical waveguide was fabricated by Yi in-diffusion, and the properties of guided-mode and the total insertion loss of the pigtailed waveguide with polarization maintaining fiber(PMF) were measured at optical wavelength 1550nm. for forming the waveguides, the parameters of diffusion, Ti thickness, waveguide line-width, length, diffusion temperature, time and atmosphere were set $1400{\AA}$, $8{\mu}m$, 3.3cm, $1050^{\circ}C$, 8 hours and wet bubbled oxygen, respectively. And then after the polishing and piatailing, it showed that the total insertion loss was -4.1dB for TM mode, -5.5dB for TE mode, and mode size, that is, the horizontal/ vertical size were $13.8{\mu}m/18{\mu}m$ for TM mode, $9.6{\mu}m/6.5{\mu}m$ for TE mode.