초록
순철과 스테인리스강 위에 $A1_2O_3,\;Ta_2O_5$ 및 $ZrO_2$의 산화물을 RF스파터링법으로 피복시켜, 피막과 모재와의 밀착성 평가, 피복강에 대한 부식거동 및 피막결함률에 대하여 고찰을 실시하였다. 미소경도시험에서 밀착성지수 $\chi$를 이용하여 산화물피막의 밀착성을 평가할 수 있었다. 임계부동화전류밀도법은 세라믹피복강재의 결함률을 평가하는데 유용한 수단임을 알 수 있었다.
To oxide film, $A1_2O_3,\;Ta_2O_5$ and $ZrO_2$, coated on stainless steel (SUS410, SUS304) and pure Fe using RF magnetron sputtering method, the corrosion resistance on oxide coatings was studied using electrochemical measurement. Also, the adherence between film and substarte was studied. The adherence index ( $\chi$ ) was determined by the measure of micro hardness test. In this paper, we know that oxide film coated on SUS304 have better corrosion resistance than that coated on SUS410. In oxide film, the difference of corrosion resistance due to crystal structure have not been showed. In evaluating defect area rate of ceramic coated materials, CPCD method can be used effectively. In the micro-hardness test, with $1{\mu}m$ thickness film, it has only one the value of $\chi$. Above $2{\mu}m$ thickness film, however, get another value of $\chi$ as the cracks in film. The oxide film adhere well on the mild materials such as pure steel than high intensity materials like stainless.