Journal of Sensor Science and Technology (센서학회지)

The Korean Sensors Society (한국센서학회)
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Gas sensing properties of $In_{2}O_{3}$ thin film prepared by spin-coating method

스핀 코팅에 의한 $In_{2}O_{3}$ 박막의 가스감지특성

  • Chung, Wan-Young (Dept. of Electronic Engineering, Semyung University) ;
  • Lim, Jun-Woo (School of Electronic and Electrical Engineering, Kyungpook National University) ;
  • Lee, Duk-Dong (School of Electronic and Electrical Engineering, Kyungpook National University) ;
  • Yamazoe, Noboru (Dept. of Materials Science and Technology, Kyushu University)
  • Published : 1998.03.31
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Abstract

The $In_{2}O_{3}$ thin films were fabricated on a alumina substrate by spin-coating method and the gas sensing properties were tested. The coating solution was synthesized by the mixing of aqueous solution of $In(OH)_{3}$ and acetic acid, and ammonium carboxymethyl cellulose as a binder. The $In_{2}O_{3}$ thin films between 71 and 210nm thick were obtained by spin-coating between 1 and 7 times followed by drying at $110^{\circ}C$ and calcining at $600^{\circ}C$. The films consisted of a dense stack of tiny $In_{2}O_{3}$ particles between 23 and 27nm in diameter and covered well large grains of the alumina substrate. Then film thickness was well controlled by the number of spin-coating. The fabricated $In_{2}O_{3}$ films showed high sensitivity and very fast response property to CO and $H_{2}$.

알루미나 기판위에 스핀코팅에 의해 $In_{2}O_{3}$ 박막을 형성하고 그 박막의 미세구조와 가스감지특성을 조사하였다. 코팅용액은 $In(OH)_{3}$ 수용액에 초산을 첨가하여 합성되었다. 이 용액에 바인더로써 암모니아 카르복실 셀루로오스를 섞어서 코팅용액으로 사용하였다. 이 용액을 $1{\sim}7$회 스핀코팅하고 $110^{\circ}C$에서의 건조와 $600^{\circ}C$에서의 열처리에 의해 두께 $71{\sim}210nm$의 $In_{2}O_{3}$ 박막을 얻을 수 있었다. 제조된 박막은 미세한 $In_{2}O_{3}$ 결정입자($23{\sim}27nm$)가 적층된 형태의 구조를 가지고 알루미나 기판의 결정입위에 균일하게 코팅되었다. 박막의 두께는 스핀코팅의 횟수에 선형적으로 증가하였다. 제조된 박막은 CO, $H_{2}$ 가스에 대해 높은 감도와 빠른 응답특성을 나타내었다.

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