Journal of the Korean Society for Precision Engineering (한국정밀공학회지)
- Volume 14 Issue 12
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- Pages.114-120
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- 1997
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- 1225-9071(pISSN)
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- 2287-8769(eISSN)
Improvement of Motion Accuracy Using Active Controlled Capillary in Hydrostatic Table
능동제어모세관을 이용한 유정압테이블의 운동정도 향상
Abstract
For compensating the error motion of hydrostatic tables, we have introduced a way that the clearance of table is controlled corresponding to the amount of eror with the actively controlled variable capillary, named as ACC. In previous paper, through the basic test, it was confirmed that by the use of ACC, the error motion within 2.7
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