• Journal of the Korean Society for Precision Engineering
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• v.19 no.6
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• pp.77-85
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• 2002

An analysis method which calculates corrective machining information for improving the motion accuracy of linear motion guide Is proposed in this paper. The method is composed of two algorithms. One is the algorithm fur prediction of the motion errors from rail form error. The other is the algorithm for prediction of rail form error from the motion errors of table. Transfer function is utilized in each algorithm, which represents the ratio of bearing reaction force variation to unit magnitude of spatial frequencies of raid from error. As the corrective machining information is acquired from the measured motion errors of table, the method has a merit not to measure rail form error directly. Validity of the method is verified both theoretically and experimentally. By applying the method, linear motion error of test equipment is reduced from 5.97$\mu$m to 0.58$\mu$m, and reduced from 32.78arcsec to 6.21 arcsec in case of angular motion error. From the results, it is confirmed that the method is very effective to improve the motion accuracy of linear motion guide.

• Journal of the Korean Society for Precision Engineering
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• v.14 no.7
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• pp.15-21
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• 1997

This paper presented a linear motion accuracy by using two-dimensional probe with the master block and the square for NC machine tools. This measuring system could be measured motion error due to numerical control system. The results of measurement and simulation for motion error were similar, and so, this system had enough accuracy to measure a linear motion accuracy for NC machine tools. The experimental results are as follows. 1. This measuring system could be measured motion error due to mumerical control system. 2. The results of measurement and simulation for motion error were similar. 3. This measuring system had enough accuracy to measure a linear motion accuracy for NC machine tools.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2004.10a
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• pp.1380-1383
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• 2004

The scanning type XY stage is frequently used these days as precision positioning system in equipment for semiconductor or display element. It is requested higher velocity and more precise accuracy for higher productivity and measuring performance. The position accuracy of general stage is primarily affected by the geometric errors caused by parasitic motion of stage, misalignments such as perpendicular error, and thermal expansion of structure. In the case of scanning type stage, H type frame is usually used as base stage which is driven by two actuators such as linear motor. In the point view of scanning process, the stage is used in moving motion. Therefore, dynamic variation is added as significant position error source with other parasitic motion error. Because the scanning axis is driven by two actuators with two position detectors, 2 dimensional position errors have different characteristic compared to general tacked type XY stage. In this study 2D position error of scanning stage is analyzed by 1D heterodyne interferometer calibrator, which can measure 1D linear position error, straightness error, yaw error and pitch error, and perpendicular error. The 2D position error is evaluated by diagonal measurement (ISO230-6). The yaw error and perpendicular error are compensated on the base stage of scanning axis. And, the horizontal straightness error is compensated by cross axis compensation. And, dynamic motion error in scanning motion is analyzed.

• Journal of the Korean Society for Precision Engineering
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• v.21 no.7
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• pp.101-106
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• 2004

Measurements of linear motion accuracy for one axis of NC lathe have achieved with laser interferometer system, but measurement of plane motion accuracy for two axes on zx-plane of NC lathe have not achieved with the above system. Therefore in this study, measuring unit system is organized using two optical linear scales in order to acquire error. data during of plane motion of ATC(Automatic Tool Change.) of NC lathe by reading zx-plane coordinates. Two optical linear scales of measuring unit are fixed on zx-plane of NC lathe, and moving part of the scales are fixed to the ATC and then error motion data of z, x-coordinates of the ATC are received from the scales through the PC counter card inserted in computer at constant time intervals using tick pulses coming out from computer. And then, error motion data files acquired from measuring are saved in computer memory and the aspect of plane motion are modeled to plots, and range of the error data, means. average deviations, and standard deviations etc. are calculated by means of statistical treatments using computer programs.

• Journal of the Korean Society for Precision Engineering
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• v.19 no.5
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• pp.139-148
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• 2002

Motion errors of linear motion guideway are analyzed theoretically in this paper. For the analysis, an new algorithm predicting motion errors of bearing and guideway is proposed using the Hertz's elastic deformation theory. Accuracy averaging effect can be calculated quantitatively by analyzing relationship between motion errors of guideway and spatial frequency of rail form error. Influences of design parameters on the motion errors including the number of balls, preload, ball diameter, bearing length and the number of bearings are analyzed. As it is difficult to measure the rail form error, experimental results are compared with results analyzed by the equivalent analysis method which evaluate the motion errors of guideway using the measured errors of bearing. From the experimental results, it is confirmed that the proposed analysis method it effective lo analyze the motion errors of linear motion bearing and guideway.

• Journal of the Korean Society for Precision Engineering
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• v.14 no.12
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• pp.114-120
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• 1997

For compensating the error motion of hydrostatic tables, we have introduced a way that the clearance of table is controlled corresponding to the amount of eror with the actively controlled variable capillary, named as ACC. In previous paper, through the basic test, it was confirmed that by the use of ACC, the error motion within 2.7$\mu$ m of a hydrostatic table could be compensated with the resolution of 27nm, 1/100 contollable range, and with the frequency bandwidth of 5.5Hz, structurally. In this paper, we performed practical compensation of the linear and angular motion error of hydrostatic table using ACC. For improving the compensated motion accuracy, iterative control method is put into the control system. The experimental results show that by the simultaneous compensation of error, the linear and angular motion error are improved upto 0.25$\mu$ m and 0.4arcsec, which are about 1/10 and 1/3 of the non-compensated motion errors respectively.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.06a
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• pp.1243-1248
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• 2003

It is very important to measure linear motion accuracy of NC lathe as it affects all other parts of machines machined by them in industries. If the motion accuracy of NC lathe is bad, the dimension accuracy and the change-ability of works will be bad in the assembly of machine parts. In this paper, computer software systems are organized to measure linear motion of ATC(Automatic tool changer) on zx plane of NC lathe using two linear scales and the time pulses coming out from computer in order to get data at constant time intervals from the linear scales. And each sets of error data obtained from the test is discripted to plots and the results of linear motion errors are expressed as numerics by computer treatment.

• International Journal of Precision Engineering and Manufacturing
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• v.6 no.2
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• pp.55-60
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• 2005

In order to develop the hydrostatic guideways driven by a core less linear motor for ultra precision machine tools, a prototype of guideway is designed and tested. A coreless linear DC motor with a continuous force of 156 N and a laser scale with a resolution of 0.01 ㎛ are used in the system. Experimental analysis on the static stiffness, motion errors, positioning error and its repeatability, micro step response and velocity variation of the guideway are performed. The guideway shows infinite stiffness within 50 N applied load in the feed direction, and by the motion error compensation method using the Active Controlled Capillary, 0.08 ㎛ linear motion error and 0.1 arcsec angular motion error are acquired. The guideway also reveals 0.21 ㎛ positioning error and 0.09 ㎛ repeatability, and it shows stable responses following a 0.01 ㎛ resolution step command. The velocity variation of feeding system is less than 0.6 ％. From these results, it is estimated that the hydrostatic guideway driven by a coreless linear motor is very useful for the ultra precision machine tools.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2000.11a
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• pp.179-183
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• 2000

This paper is concerned with achieving the high motion accuracy of linear motion bearing guide according to estimate accuracy average effect of bearing. Accuracy average effect can be obtained b analysis the relationship between motion error of the table and spatial frequency of the rail form error. And influences of ball diameter, ball number, and clock length on block motion error and block number on the table motion error are analyzed theoretically. In addition to, a simple experiment is performed in order to verify theoretical result.

• Journal of the Korean Society for Precision Engineering
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• v.28 no.3
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• pp.275-284
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• 2011

The accuracy simulation technology of linear motion system is introduced in this paper. Motion errors and positioning errors are simulated using informations on the design parameters of elements of linear motion system. 5 Degree-of-freedom motion error analysis algorithm utilizing the transfer function method and positioning error analysis algorithm which are main frame of accuracy simulation are introduced. Simulated motion errors are compared with experimental results for verifying the effectiveness. Then, using the proposed algorithms, simulation is performed to investigate the effects of ballscrew and linear motor on the motion errors. Finally, the influence of feedback sensor position on the positioning error is also discussed.