The Korean Journal of Ceramics

The Korean Ceramic Society (한국세라믹학회)
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Fabrication and Characteristics of Li-doped ZnO Thin Films for SAW Filter Applications

  • Ha, Jae-Soo (Department of Inorganic Materials Engineering, Pusan National University) ;
  • Kim, Kwang-Ho (Departmet of Inorganic Materials Engineering, Pusan National University)
  • Published : 1997.06.01
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Abstract

Li-doped ZnO films were prepared on Corning 1737 glass substrate by an rf magnetron sputtering technique using ZnO targets with various $Li_2CO_3$ contents ranging from 0 to 10 mol%. The effects of Li doping on the crystallinity and electrical properties of ZnO films were studied for their SAW filter applications. The film resistivity largely increased without suppressing the c-axis orientation and crystallinity with a small addition of Li. Heat treatment of the film at 40$0^{\circ}C$ induced that the film resistivity, c-axis orientation and crystallinity slightly increased. However, heat treatment of the film at 50$0^{\circ}C$ resulted in much lower resistivity than that of as-deposited film due to the increase of electron concentration caused by the evaporationof Li atoms from the ZnO film. Large addition of Li into the ZnO film rather diminished the film resistivity and suppressed the c-axis growth. It was concluded that a small doping of Li into the ZnO film and heat treatment at 40$0^{\circ}C$ caused the film resistivity to be high enough for SAW filter applications without suppression of the c-axis orientation and crystallinity.

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References

  1. Thin Solid Films v.102 Transparent Conductors-A Status Review K. L. Chopra;S. Major;D. K. Pandya
  2. J. Vac. Sci. Technol. v.16 no.4 Optical and Electrical roperties of ZnO Films Prepared by Spray Pyrolysis for Solar Cell Applications J. Aranovich;A. Ortiz;R. H. Bube
  3. J. Electrochem. Soc. v.129 no.6 Calculation of Carrier Concentration in Polycrystalline Films asl a Function of Surface Acceptor State Density: Application for ZnO Gas Sensors D. J. Leary;J. O. Barnes;A. G. Jordan
  4. J. Appl. Phys. v.51 no.5 Structures and SAW Properties of RF-Sputtered Single-Crystal Films of ZnO on Sapphire T. Mitsuyu;S. Ono;K. Wasa
  5. J. Appl. Phys. v.51 no.6 Characterization of ZnO Piezoelectric Films Prepared by RF Planar-Magnetron Sputtering T. Yamamoto;T. Shiosaki;A. Kawabata
  6. Jpn. J. Appl. Phys. v.31 Piezoelectric characteristics of ZnO Films Deposited Using an Electron Cyclotron Resonance Sputtering System M. Kadota;T. Kasanami;M. Minakata
  7. J. Electrochem. Soc. v.136 no.11 Electrical Characteristics of Lithium-Doped ZnO Films J. K. Srivastaya;L. Agarwal;A. B. Bhattacharyya
  8. J. Appl. Phys. v.50 no.5 Optical Properties of Single-Crystalline ZnO Film Smoothly Chemical-Vapor Deposited on Intermediately Sputtered Thin ZnO Film on Sapphire T. Shiosaki;S. Ohnishi;A. Kawabata
  9. J. Crystal Growth v.71 Growth of ZnO Films by the Plasma-Enhanced Metalorganic Chemical Vapor Deposition Technique M. Shimizu;Y. Matsueda;T. Shiosaki;A. Kawabata
  10. J. Appl. Phys. v.52 no.11 Properties of Zine Oxide Films Prepared by the Oxidation of Diethyl Zine A. P. Roth;D. F. Williams
  11. J. Crystal Growth v.57 Growth of C-axis Oriented ZnO Thin Films with High Deposition Rate on Silicon by CVD Method M. Shimizu;T. Shiosaki;A. Kawabata
  12. Jpn. J. Appl. Phys. v.24 no.8 Influence of Energetic Oxygen Bombardment on Conductice ZnO Films K. Tominaga;T. Yuasa;M. Kume;O. Tada
  13. J. Appl. Phys. v.73 no.10 Relation between Optical Property and Crystallinity of ZnO Thin Films Prepared by RF Magnetron Sputtering S. Takada
  14. J. Appl. Phys. v.55 no.4 Electrical and Optical Properties of Zinc Oxide Thin Films Prepared by RF Magnetron Sputtering for Transparent Electrode Applications H. Nanto;T. Minami;S. Shooji;S. Takata
  15. J. Electrochem. Soc. v.127 no.7 Relationship between Deposition Conditions and Physical Properties of Sputtered ZnO J. O. Barnes;D. J. Leary;A. G. Jordan
  16. J. Mater. Sci. v.27 Development of Transparent and Conductive ZnO Films by Spray Pyrolysis D. J. Goyal;C. Agashe;M. G. Takwale;B. R. Marathe;V. G. Bhide
  17. Thin Solid Films v.125 Optical and Electronic Properties of Zinc Oxide Films Prepared by Spray Pyrolysis S. Major;A. Banerjee;K, L. Chopra
  18. J. Electrochem. Soc. v.133 no.11 Influence of Surface Processes on Electrical, Photochemical, and Thermodynamical Properties of Zine Oxide Films P. Bonasewiez;W. Hirschwald;G. Neumann
  19. Proceedings IEEE Ultrasonics Symposium T. Shiosaki
  20. MRS Bulletin v.21 no.3 Glass Substrates for Flat Panel Displays D. M. Moffatt
  21. PekinElmer Corporation Handbook of X-ray Photoelectron Spectroscopy J. F. Moulder;W. F. Stickle;P. E. Sobol;K. D. Bomben
  22. J. Electron Spectrosc. Relat. Phenom. v.2 Auger and Direct Electron Spectra in X-ray Photoelectron Studies of Zine Oxide, Gallium Oxide G. Schoen