The Korean Journal of Ceramics

The Korean Ceramic Society (한국세라믹학회)
권호 표지

Structure and Mechanical Properties of Si Incorporated Diamond-like Carbon Films Prepared by PACVD

  • Published : 1997.06.01
Download PDF
⟨ Previous Next ⟩

Abstract

Although tribological behavior of Si incorporated DLC films have been intensely investigated, their mechanical properties were not consistent among previous publications. The present work reported the structural change by adding Si, and their effects on the mechanical properties. Si incoporated DLC films were deposited using mixtures of benzene and diluted silane with hydrogen of various volume fractions. We could obtain the films of $X_{si}$ (defined by the Si fraction without considering hydrogen) ranging from 0.01 to 0.21, and found that the mechanical properties of the films changed significantly in the range less than $X_{si}=0.06$. In this range, the hardness and stress increased with Xsi. For higher content of Si, the hardness and stress showed saturated behavior with $X_{si}$. This behavior was discussed in terms of the changes in atomic bond structures.

Keywords

References

  1. Thin Solid Films v.143 Properties of Polymeric Layers of Hydrogenated Amorphous Carbon Produced by Plasma-activated Chemical Vapour deposition Process R. Memming;H. J. Tolle;P. E. Wierenga
  2. J. Appl. Phys. v.63 Abrasive Wear Resistance of Ion-deposited Hard Carbon Films as a Function of Deposition Energy J. Koskinen
  3. Thin Solid Films v.80 Some new Results on the Fabrication of and the Mechanical, Electrical and Optical Properties of I-Carbon layers K. Enke
  4. J. Vac. Sci. Technol. v.A4 Tribological Properties of metal/carbon Coatings E. Bergmann;J. Vogel
  5. Mater. Sci. Forum v.52/53 Microstructure and Physical Properties of Metal-containing Hydrogenated Carbon Films C. P. Klages;R. Memming
  6. Appl. Phys. Lett. v.50 Tribological and Electrical Properties of Metal-containing Hydrogenated Carbon Films H. Dimigen;H. Hubsch;R. Memming
  7. Surf. Coat. Technol. v.47 no.1-3 Tribological Properties and Characterization of Diamond-like Carbon Coatings with Silicon Prepared by plasma-assisted Chemical Vapour Deposition K. Oguri;T. Arai
  8. Surf. Coat. Technol. v.46 Tribology of Carbonaceous films Formed by Ion-beamassisted Deposition of Organic Materials T. Hioki;Y. Itoh;A. Itoh;S. Hibi;J. Kawamoto
  9. Wear v.168 no.1-2 Microtribological Improvement of Carbon Film by Silicon Inclusion and Fluorination S. Miyake;T. Miyamoto;R. Kaneko
  10. Proc. MRS v.308 Micromechanical Behaviour of Amorphous Hydrogenated Silicon Carbide Films J. Meneve;R. Jacobs;F. Lostak;L. Eersels;E. Emkempeneer;J. Smeets
  11. Phys. Rev. B v.35 Electronic and Atomic Structure of Amorphous Carbon J. Robertson;E. P. O'Reilly
  12. unpublished work K. R. Lee
  13. CRC Handbook of Chemistry and Physics(68th ed.)
  14. Mater. Sci. Forum v.52/53 Raman Spectra of Diamondlike Amorphous Carbon Films M. Yoshikawa
  15. Phys. Rev. v.B39 Symmetry Breaking in Nitrogen-doped Amorphous Carbon: Infrared Observation of the Raman-active G and D Bands J. H. Kaufman;S. Metin
  16. J. Appl. Phys. v.66 no.2 Lubricating Performance Enhancement of Amorphous Silicon Carbide Films by Annealing Effects and Microbeam Analyses of the Tribological Interface I. Sugimoto;S. Miyake
  17. Phil. Mag. v.B66 no.5 The Electronic and Atomic Structure of Hydrogenated Amorphous Si-C Alloys J. Robertson