Journal of the Korean institute of surface engineering (한국표면공학회지)
- Volume 29 Issue 5
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- Pages.563-569
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- 1996
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- 1225-8024(pISSN)
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- 2288-8403(eISSN)
DEGRADATION OF Zn$_3$ $N_2$ FILMS PREPARED BY REACTIVE RF MAGNETRON SPUTTERING
- Futsuhara, Masanobu (Department of Materials Processing Engineering, School of Engineering, Nagoya University, Paint Design Institute, Nippon Paint Co., Ltd.) ;
- Yoshioka, Katsuaki (Paint Design Institute, Nippon Paint Co., Ltd.) ;
- Takai, Osamu (Department of Materials Processing Engineering, School of Engineering, Nagoya University)
- Published : 1996.10.01
Abstract
Degradation of
Keywords