한국표면공학회지 (Journal of the Korean institute of surface engineering)

  • 제29권5호
  • /
  • Pages.474-477
  • /
  • 1996
  • /
  • 1225-8024(pISSN)
  • /
  • 2288-8403(eISSN)
한국표면공학회 (The Korean Institute of Surface Engineering)
권호 표지

SOLID STATE CESIUM ION BEAM SPUTTER DEPOSITION

  • Baik, Bong-Koo (Department of Metallurgical Engineering, Yonsei University) ;
  • Choi, Dong-Jun (Department of Metallurgical Engineering, Yonsei University) ;
  • Han, Dong-Won (Department of Metallurgical Engineering, Yonsei University) ;
  • Kim, Yong-Hwan (Department of Metallurgical Engineering, Yonsei University) ;
  • Kim, Seong-In (SKION Corporation)
  • 발행 : 1996.10.01
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초록

The solid state cesium ion beam sputter deposition system has been developed for negative carbon ion beam deposition. The negative carbon ion beams are effectively produced by cesium ion bombardment. The C-ion beam current and deposition energy can be independently controlled for the deposition of a-D films. This system is very compact, reliable and high flux without any gas discharge or plasma and has been successfully used in the studies of the ion beam deposited amorphous diamond(a-D)

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