Study on the Application of Exicimer Laser(1)
엑사이머 레이저 응용 기술에 관한 연구(I)
- Hwang, Gyeong-Hyeon ;
- Yun, Gyeong-Gu ;
- Lee, Seong-Guk ;
- Kuzmichov, A.V.
- Published : 1995.12.31
Abstract
The aim of this project is the development of technology of production of micro mechanical parts. Materials are Cr, pt or film (thickness
Keywords