참고문헌
-
IEDM
A Stack Capacitor with
$(Ba_{x}Sr_{1-x})$ TiO₃for 256M DRAM K. Koyama;T. Sakuma;S. Yamamichi;H. Watanabe;H. Aoki;S. Ohya;Y. Miyasaka;T. Kikkawa - Mat. Res. Symp Proc v.234 SiTiO₃and (Ba,Sr)TiO₃ Thin Films Preparation by Ion Beam Sputtering and Their Dielectric Properties S. Yamamichi;T. Sakuma;T. Hase;Y. Miyasaka
-
Proceedings 4th ISIF
Deposition of
$Ba_{1-x}Sr_x$ TiO₃and SrTiO₃ via Liquid Source CVD(LSCVD) for ULSI DRAMs L.D. McMillan;T.L. Roberts;M.C. Scott;C.A. Pazde Arauzo - Appl. Phys. Lett v.62 no.10 Excimer Laser ablated Barium Strontium Tiyanate Thin Films for Dynamic Random Access Memory Applications D. Roy;S.B. Krupanidhi
- J. Mater. Res. v.9 Preferred Orientation and Microstructure of Ni-Zn-Cu Ferrite Thin Films Deposited by RF Magnetron Sputtering H.S. Cho;M.H. Kim;H.J. Kim
- Ceramic Materials for Electronics(2nd Edition) R.C. Buchanan;R.C. Buchanan(ed.)
- Integrated Ferroelectrics v.1 Dielectric Response of Ferroelectric Thin Films on Non-Metallic Electrodes M. Sayer;A. Mansingh;A.K. Arora;A. Lo
- Jpn. J. Appl. Phys. v.31 Electric Properties of SrTiO₃Thin Films Prepared by RF Sputtering T. Kuroiwa;T. Honda;H. Watarai;K. Sato
- J. Vac. Sci. Technol. v.A8 no.1277 Ion-assisting Magnetron Sources: Principles and Uses B. Window;G.L. Harding
- Ion Bombardment Modification of Surface;Fundamentals and Application J.M.E. Harper;J.J. Cuomo;R.J. Gambino;H.R. Kaufman;O. Auciello(ed.);R. Kelly
- Jpn. J. Appl. Phys v.32 no.9B Comparative Study of Amorphous and Crystalline (Ba,Sr)TiO₃Thin Films Deposited by Laser Ablation P. Bhattacharya;T. Komeda;K. Park;Y. Nishioka
- IEICE Trans Elec. v.E77-C no.3 (BaO 75, Sr0.25) TiO3 Films for 256 Mbit DRAM T. Horikawa;N. Mikami;H. Ito;Y. Ohno;T. Makita;K. Sato
- Proceeding of 4th ISIF v.221 Anomalous Fatigue Behavior in Zn Doped PZT B.M. Melnick;M.C. Scott;C.A. Paz de Araujo;L.D. McMillan;T. Mihara
- Mat. Res. Soc. Proc. v.245 no.291 Structural and Electrical Properties of BaTiO₃Thin Film Capacitors Z.Q. Shi;X.Q. Jia;W.A. Anderson
- J. Elecrtonic Materials v.20 no.11 High-Performance Barium Titanate Capacitors With Double Layer Structure Z.Q. Shi;X.Q. Jia;W.A. Anderson
- J. Elecrtonic Materials v.23 no.1 Effect of Barrier Layers on BaTiO₃Thin Film Capacitors on Si Substrates Q.X. Jia;Z.Q. Shi;J. Yi;W.A. Anderson