Electrical & Electronic Materials (E2M - 전기 전자와 첨단 소재)
- Volume 7 Issue 1
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- Pages.25-31
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- 1994
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- 2982-6268(pISSN)
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- 2982-6306(eISSN)
Properties of the oxynitride films formed by thermal reoxidation in $N_2{O}$ gas
$N_2{O}$ 가스로 재산화시킨 oxynitride막의 특성
Abstract
Properties of oxynitride films reoxidized by
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