${\gamma}-Fe_2O_3$/Pd$ Thick Film Gas Sensors

${\gamma}-Fe_2O_3$/Pd$ 후막형 가스 감지소자

The physical properties of \ulcorner-Fe2O3 raw materials were investigated. \ulcorner-Fe2O3/Pd thick film gas sensors were fabricated with screen-printing method and their electrical and sensitivity characteristics were analyzed. The irreversible phase transition from \ulcorner-Fe2O3 to \ulcorner-Fe2O3 occured at 500\ulcorner. At this time, the cation of tetrahedral sites moved into the octahedral sites. \ulcorner-Fe2O3 raw materials contained only trivalent and no divalent iron. Thecontents of divalent iron (Fe+\ulcorner were increased as detecting gases were adsorbed. The addition of Pd (1w/o) to \ulcorner-Fe2O3 enhanced the sensitivity to gases. The sentivity of \ulcorner-Fe2O3/Pd(1w/o) thick film to 5000ppm C4H10 was 97% at the operating temperature of 300\ulcorner.