LOCOS 공정에서 새부리 크기 감소를 위한 연구

A Study on the Reduction of Bird's Beak in the LOCOS Process

We study the process for the reduction of bird's beak at LOCOS processing with changing the representative coefficients, oxide thickness, silicon nitride thickness, oxidetion temperature and field oxide thickness that induced the condition of bird'beak. In order to eliminate the gate oxide defects induced by selective oxidation, we used additional sacrific oxidatio. Finally we obtained the length of bird's beak to be 5000\ulcornerby SEM.