대한전자공학회논문지 (Journal of the Korean Institute of Telematics and Electronics)

대한전자공학회 (The Institute of Electronics and Information Engineers)
권호 표지

Trench Epitaxial Transistor Cell(TETC)의 제조

Production of Trench Epitaxial Transistor(TETC)

  • 발행 : 1989.08.01
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초록

A new dynamic RAM cell called Trench Epitaxial Transistor Cell (TETC) has been developed for 4M to 16M DRAMS. Also the fabrication process for device isolation which can decrease the narrow effect using SEG process has been developed. We verified the characteristic of the new cell structure with the PICSES simulator on VAX8450.

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