Journal of the Korean institute of surface engineering (한국표면공학회지)
- Volume 22 Issue 4
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- Pages.215-220
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- 1989
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- 1225-8024(pISSN)
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- 2288-8403(eISSN)
A Study on the Electrical Properties of Plasma Silicon Nitride
플라즈마 실리콘 질화막의 전기적 특성에 관한 연구
Abstract
Silicon Nitride whose thickness is about
Keywords