Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2012.08a
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- Pages.376-376
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- 2012
Thermal Stability Enhanced Ge/graphene Core/shell Nanowires
- Lee, Jae-Hyeon ;
- Choe, Sun-Hyeong ;
- Jang, Ya-Mu-Jin ;
- Kim, Tae-Geun ;
- Kim, Dae-Won ;
- Kim, Min-Seok ;
- Hwang, Dong-Hun ;
- Najam, Faraz ;
- Hwang, Seong-U ;
- Hwang, Dong-Mok
- 이재현 (성균관대학교 나노과학기술원) ;
- 최순형 (성균관대학교 나노과학기술원) ;
- 장야무진 (성균관대학교 나노과학기술원) ;
- 김태근 (고려대학교 전기전파공학부) ;
- 김대원 (고려대학교 전기전파공학부) ;
- 김민석 (고려대학교 전기전파공학부) ;
- 황동훈 (고려대학교 전기전파공학부) ;
- ;
- 황성우 (삼성종합기술원 타임도메인 나노기능소자 연구단) ;
- 황동목 (삼성종합기술원 타임도메인 나노기능소자 연구단)
- Published : 2012.08.20
Abstract
Semiconductor nanowires (NWs) are future building block for nano-scale devices. Especially, Ge NWs are fascinated material due to the high electrical conductivity with high carrier mobility. It is strong candidate material for post-CMOS technology. However, thermal stability of Ge NWs are poor than conventional semiconductor material such as Si. Especially, when it reduced size as small as nano-scale it will be melted around CMOS process temperature due to the melting point depression. Recently, Graphene have been intensively interested since it has high carrier mobility with single atomic thickness. In addition, it is chemically very stable due to the