한국진공학회:학술대회논문집 (Proceedings of the Korean Vacuum Society Conference)
- 한국진공학회 2011년도 제41회 하계 정기 학술대회 초록집
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- Pages.177-179
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- 2011
Improvement of Adhesion Strength of DLC Films on Nitrided Layer Prepared by Linear Ion Source
- Shin, Chang-Seouk (Pusan National University) ;
- Kim, Wang-Ryeol (Pusan National University) ;
- Park, Min-Seok (Korea Institute of Industrial Technology) ;
- Jung, Uoo-Chang (Korea Institute of Industrial Technology) ;
- Chung, Won-Sub (Pusan National University)
- 발행 : 2011.08.17
초록
The purpose of this study is to enhance an adhesion between substrate and Diamond-like Carbon (DLC) film. DLC has many outstanding properties such as low friction, high wear resistance and corrosion resistance. However, it is difficult to achieve enough adhesion because of weak bonding between DLC film and the substrate. For improvement adhesion, a layer between DLC film and the substrate was prepared by dual post plasma. DLC film was deposited on nitrided layer by linear ion source. The composed compound layer between substrate and DLC film was investigated by Glow Discharge Spectrometer (GDS) and Scanning Electron Microscope (SEM). The synthesized bonding structure of DLC film was analyzed using a micro raman spectrometer. Mechanical properties were measured by nano-indentation. In order to clarify the mechanism for improvement in adhesive strength, it was observed by scratch test.