한국신재생에너지학회:학술대회논문집
- 2010.11a
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- Pages.38.1-38.1
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- 2010
Investigation of Al Back Contact and BSF Formation by In-situ TEM for Silicon Solar Cells
- Park, Sungeun ;
- Song, Jooyoung ;
- Tark, Sung Ju ;
- Kim, Young Do ;
- Choi, Chel-Jong ;
- Kwon, Soonwoo ;
- Yoon, Sewang ;
- Kim, Donghwan
- 박성은 (고려대학교) ;
- 송주용 (고려대학교) ;
- 탁성주 (고려대학교) ;
- 김영도 (고려대학교) ;
- 최철종 (전북대학교) ;
- 권순우 (TS대한제당) ;
- 윤세왕 (TS대한제당) ;
- 김동환 (고려대학교)
- Published : 2010.11.16
Abstract
The trend to thinner crystalline silicon solar wafers in production of solar cells investigates re-evolution of back surface field (BSF) formation. We have studied mechanisms of back contact formation in Al evaporation and screen printed Al paste for Si solar cells by TEM analysis. We observed that Si diffuse into Al during heat up. The Si diffusion process made vacancies in Si wafer. The Al began to seep into the Si wafer (Al spike). During heat down, the Al spike were shrink which causes the doped region (BSF).