한국진공학회:학술대회논문집 (Proceedings of the Korean Vacuum Society Conference)
- 한국진공학회 2009년도 제36회 동계학술대회 초록집
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- Pages.171.1-171.1
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- 2009
Effect of post heat-treatment on microstructure and dielectric properties of $Ba_{0.5}Sr_{0.5}TiO_3$ thin films by RF magnetron sputtering
- Lee, Chil-Hyoung (Thin Film Materials Research Center, Korea Institute of Science and Technology) ;
- Choi, Doo-Jin (Department of ceramic Engineering, Yonsei University) ;
- Oh, Young-Jei (Thin Film Materials Research Center, Korea Institute of Science and Technology)
- 발행 : 2009.02.11