한국진공학회:학술대회논문집 (Proceedings of the Korean Vacuum Society Conference)

한국진공학회 (The Korean Vacuum Society)

권호 표지

Effect of annealing gas in MONOS capacitors with blocking oxide grown by radical oxidation process

Kim, H.D. (Korea University) ;
An, H.M. (Korea University) ;
Seo, Y.J. (Korea University) ;
Zhang, Y. (Korea University) ;
Nam, K.H. (Kwangwoon University) ;
Cho, W.J. (Kwangwoon University) ;
Kim, T.G. (Korea University)

발행 : 2009.02.11

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