Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2009.04b
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- Pages.13-16
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- 2009
Fabrication of SAW for harsh environment USN and its characteristics
극한 환경 USN용 SAW 제작과 그 특성
- Chung, Gwiy-Sang (University of Ulsan) ;
- Hoang, Si-Hong (University of Ulsan)
- Published : 2009.04.03
Abstract
In this study, AlN thin films were deposited on a polycrystalline (poly) 3C-SiC buffer layer for surface acoustic wave (SAW) applications using a pulsed reactive magnetron sputtering system. AFM, XRD and FT-IR were used to analyze structural properties and preferred orientation of the AlN/3C-SiC thin film. Suitability of the film in SAW applications was investigated by comparing the SAW characteristics of an interdigital transducer (IDT)/AlN/3C-SiC structure with the IDT/AIN/Si structure at 160 MHz in the temperature range