Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
권호 표지

Mechanically Flexible PZT thin films on Plastic Substrates

플라스틱 기판위의 기계적으로 유연성을 가진 PZT 박막

  • Rho, Jong-Hyun (School of Advanced Material Science and Engineering, Sungkyunkwan Univ.) ;
  • Ahn, Jong-Hyun (School of Advanced Material Science and Engineering, Sungkyunkwan Univ.) ;
  • Lee, Nae-Eung (School of Advanced Material Science and Engineering, Sungkyunkwan Univ.) ;
  • Ahn, Joung-Ho (School of Advanced Material Science and Engineering, Sungkyunkwan Univ.) ;
  • Kim, Sang-Jin (eMD Lab. Central R&D Institute SAMSUNG ELECTRO-MECHANICS) ;
  • Lee, Hwan-Soo (eMD Lab. Central R&D Institute SAMSUNG ELECTRO-MECHANICS)
  • 노종현 (성균관대학교 신소재공학부) ;
  • 안종현 (성균관대학교 신소재공학부) ;
  • 안정호 (성균관대학교 신소재공학부) ;
  • 이내응 (성균관대학교 신소재공학부) ;
  • 김상진 (삼성전기 중앙연구소 eMD Lab.) ;
  • 이환수 (삼성전기 중앙연구소 eMD Lab.)
  • Published : 2009.06.18
Download PDF
⟨ Previous Next ⟩

Abstract

We have investigated the fabrication and properties of bendable PZT film formed on plastic substrates for the application in flexible memory. These devices used the PZT active layer formed on $SiO_2/Si$ wafer by sol-gel method with optimized device layouts and Pt electrodes. After etching Pt/PZT/Pt layers, patterned by photolithography process. these layers were transferred on PET plastic substrate using elastomeric stamp. The level of performance that can be achieved approaches that of traditional PZT. devices on rigid bulk wafers.

Keywords