한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2009년도 추계학술대회 논문집
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- Pages.192-192
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- 2009
Electrical and optical properties of AZO films sputtered in $Ar:H_2$ gas RF magnetron sputtering system
- Hwang, Seung-Taek (Wonkwang Univ. WRISS) ;
- So, Byung-Moon (Chonbuk National Univ.) ;
- Park, Choon-Bae (Wonkwang Univ. WRISS)
- 발행 : 2009.11.12
초록
AZO films were prepared by