한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2009년도 추계학술대회 논문집
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- Pages.130-130
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- 2009
다결정 3C-SiC 마이크로 공진기의 온도 특성
Fabrication of Pd/poly 3C-SiC Schottky diode hydrogen sensors
- Ryu, Kyong-Il (University of Ulsan) ;
- Chung, Gwiy-Sang (University of Ulsan)
- 발행 : 2009.11.12
초록
This paper describes the temperature characteristics of polycrystalline 3C-SiC micro resonators. The 1.2