Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2009.11a
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- Pages.118-118
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- 2009
3차원 LTCC 기판을 이용한 압전 압력 센서의 제작 및 연구 특성
- Heo, Won-Yeong ;
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Hwang, Hyeon-Seok
;
- U, Hyeong-Gwan ;
- Lee, Tae-Yong ;
- Lee, Gyeong-Cheon ;
- Sim, Deung ;
- Song, Jun-Tae
- Published : 2009.11.12
Abstract
Low temperature co-fired ceramic (LTCC) is one of promising materials for MEMS structures because it has very good electrical and mechanical properties as well as possibility of making various three dimensional (3D) structures. In this work, piezoelectric pressure sensors based on hybrid LTCC technology were presented. The LTCC diaphragms with thickness of 400 um were fabricated by laminating 12 green tapes which consist of alumina and glass particle in an organic binder. The piezoelectric sensing layer consists of