한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2009년도 추계학술대회 논문집
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- Pages.113-113
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- 2009
고온, 고전압용 SiC 마이크로 히터 설계, 제작 및 특성
Design fabrication and characteristics of 3C-SiC micro heaters for high temperature, high powers
- Jeong, Jae-Min (School of Electrical Eng., Univ. of Ulsan) ;
- Chung, Gwiy-Sang (School of Electrical Eng., Univ. of Ulsan)
- 발행 : 2009.11.12
초록
This paper describes the characteristics of a poly 3C-SiC micro heater which was fabricated on