한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2009년도 추계학술대회 논문집
- /
- Pages.71-71
- /
- 2009
이중 나선형 NiFe 자성 박막인덕터를 이용한 원칩 DC-DC 컨버터
Double rectangular spiral thin-film inductors implemented with NiFe magnetic cores for on-chip dc-dc converter applications
- Lee, Young-Ae (Kyungpook National Univ.) ;
- Kim, Sang-Gi (ETRI) ;
- Do, Seung-Woo (Kyungpook National Univ.) ;
- Lee, Yong-Hyun (Kyungpook National Univ.)
- 발행 : 2009.11.12
초록
This paper describes a simple, on-chip CMOS compatible the thin-film inductor applied for the dc-dc converters. A fully CMOS-compatible thin-film inductor with a bottom NiFe core is integrated with the DC-DC converter circuit on the same chip. By eliminating ineffective top magnetic layer, very simple process integration was achieved. Fabricated monolithic thin film inductor showed fairly high inductance of 2.2