Influence of Compositions on Sol-Gel Derived Amorphous In-Ga-Zn Oxide Semiconductor Transistors

  • Kim, Dong-Jo (Dept. of Materials Science and Engineering, Yonsei University) ;
  • Koo, Chang-Young (Dept. of Materials Science and Engineering, Yonsei University) ;
  • Song, Keun-Kyu (Dept. of Materials Science and Engineering, Yonsei University) ;
  • Jeong, Young-Min (Dept. of Materials Science and Engineering, Yonsei University) ;
  • Moon, Joo-Ho (Dept. of Materials Science and Engineering, Yonsei University)
  • Published : 2009.10.12

Abstract

We investigated the influence of chemical compositions of gallium and indium cations on the performance of solgel derived amorphous gallium indium zinc oxide (a-GIZO) based thin-film transistors (TFTs). Systematical composition study allows us to understand the solutionprocessed a-GIZO TFTs. Understanding of the compositional influence can be utilized for tailoring the solution processed amorphous oxide TFTs for the specific applications.

Keywords