한국정보디스플레이학회:학술대회논문집

The Korean Infomation Display Society (한국정보디스플레이학회)
권호 표지

The effect of electro-annealing on the electrical properties of ITO film on colorless polyimide substrate

  • Song, Jun-Cheol (Dept. of Polymer Science, Kyungpook National University) ;
  • Park, Deok-Hun (Dept. of Polymer Science, Kyungpook National University) ;
  • Park, In-Sung (Dept. of Polymer Science, Kyungpook National University) ;
  • Shim, Shang-Hun (Dept. of Polymer Science, Kyungpook National University) ;
  • Yoon, Keun-Byoung (Dept. of Polymer Science, Kyungpook National University)
  • Published : 2009.10.12
Download PDF
⟨ Previous Next ⟩

Abstract

The effect of different annealing methods on the sheet resistance of indium tin oxide (ITO) on polyimide (PI) substrate has been investigated. As electro-annealing induced the predominant growth of crystallites of ITO thin films along (400) plane, the sheet resistance of ITO films that were electro-annealed for 2 mA at $180^{\circ}C$ considerably decreased from 50 to 28 ${\Omega}/cm^2$.

Keywords