한국정보디스플레이학회:학술대회논문집

The Korean Infomation Display Society (한국정보디스플레이학회)
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Enhanced Properties of IZO Thin Film Prepared by Nano-Powder Target

  • Ji, Seung-Hun (Department of Electronics & Display Engineering, Catholic University of Daegu) ;
  • Youn, Hyun-Oh (Department of Electronics & Display Engineering, Catholic University of Daegu) ;
  • Seo, Sung-Bo (Department of Electronics & Display Engineering, Catholic University of Daegu) ;
  • Kim, Mi-Sun (Department of Electronics & Display Engineering, Catholic University of Daegu) ;
  • Sohn, Sun-Young (Department of Electronics & Display Engineering, Catholic University of Daegu) ;
  • Kim, Jong-Jae (Department of Electronics & Display Engineering, Catholic University of Daegu) ;
  • Kim, Hwa-Min (Department of Electronics & Display Engineering, Catholic University of Daegu)
  • Published : 2009.10.12
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Abstract

Compared to the indium zinc oxide (IZO) film fabricated by micro-powder target, the IZO film with nano-powder target exhibited improved optoelectronic properties of wide bandgap, high transmittance, surface uniformity, and low sheet resistance due to the high film density.

Keywords