한국정보디스플레이학회:학술대회논문집
- 2009.10a
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- Pages.1036-1039
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- 2009
In-line Automatic defect repair method for TFT-LCD Production
- Arai, Takeshi (Production Engineering Research Laboratory Hitachi Ltd.) ;
- Nakasu, N. (Production Engineering Research Laboratory Hitachi Ltd.) ;
- Yoshimura, K. (Production Engineering Research Laboratory Hitachi Ltd.) ;
- Edamura, T. (Production Engineering Research Laboratory Hitachi Ltd.)
- Published : 2009.10.12
Abstract
We have developed an automated circuit defect repair method. We focused on the resist patterns on the circuit material layer of TFT substrates before the etching process. In this paper, we report on the repair method that utilizes the syringe system and the stability of the open defect repair process.